Magnetically shielded rooms for large ebeam applications
Modern research deals with tiny structures, often even with dimensions on the atomic scale. The research instruments are particularly sensitive to any disturbances like climate changes, accoustic, vibrations, mechanical shocks and likewise magnetic fields. Therefore, magnetically protected laboratories in which such disturbances are reduced to a minimum are needed. Magnetic fields can be reduced by either passive shielding, active cancellation, or the combination of both.
With Systron LabShield®, a mu-metal based magnetic shielding system is available to shield entire rooms against static DC, slow varying DC and electromagnetic AC and DC stray fields. Those fields are emanated from magnets, moving metal objects such as cars or elevators and electrical components such as transformers, cables, distribution panels or over head high-tension power lines.
Systron individually designs the magnetically shielded rooms, based on the proven shielding system Systron LabShield®. Systron LabShield® is a magnetic shielding system designed to attenuate static DC, slow varying DC shifts and AC stray fields. Magnetically shielded rooms for ebeam applications are a safe and reliable method to protect sensitive tools, such as electron microscopes, ebeam writers or focused ion beam from unwanted electromagnetic fields.
With the Systron LabShield® series, the various room and foundation constructions are met, regardless whether the shielding needs to go under or on top of the foundations, or a room in room design is required.
The LabShield® series offers a full series of standardized configurations, however, they are adapted to the individual needs.
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