Magnetic shielding for electrical equipment  
Mu-metal shieldings for devices
  Mu-Metal magnetic shielding for electron microscopes, lithography writers, wafer inspection  
Magnetic shielding for buildings and rooms
 
Stray field shield for NMR magnets
  Photovoltaic magnetic shielding systems  
Magnetic field modeling and measurements
 
Information for architects and engineers
Electrical equipment
 
Devices
 
Laboratories
 
Buildings, rooms
 
NMR, magnets    Photovoltaic
 
Services
 
Architects / Engineers

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Systron LabShield® - Lithography room:

Systron LabShield® - DC/AC magnetic shielding for lithography / mask writer room

A photo mask production room has been magnetically shielded with mu-metal to protect the lithography mask writer from EMI. The room meets cleanroom specifications according to ISO Class 3, which specifies e.g. no more than 35 particles larger than 0.5 µm (0.5 micro-meters) per m2. While the mask writer itself is completely inside the shielded room, the feeders are accessible from the outside, maintaining completely unimpeded access to the feeders. This special design was developped by Systron and is used for applications with very high requirements regarding attenuation of the shielding, cleanlyness of the room and servicability of the tool.

Installation of mu-metal plates in clean room

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Magnetic field measurement in mu-metal shielded cleanroom

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Plate indicating magnetically shielded room

Installation of the mu-metal shielding plates
Measurement of the shielding performance
Plate indicating room is magnetically shielded
         
Magnetically shielded room with integrated feeder opening   Feeder integrated shielding principle    
Frame based subconstruction of magnetically shielded room with feeder opening and maintenance door   Feeder integrated shielding design. Tool fully inside shielding, unimpeded access of feeder in production area    

Systron LabShield® - TEM room:

Systron LabShield® - DC/AC magnetic shielding for TEM room

At the Technical University Dresden, two microscopy rooms have been magnetically shielded with the Systron LabShield® shielding system. The magnetic shielding was necessary, since the nearby tramway created massive DC shifts. With the shielding, the TEMs can now be operated with maximum performance.

Electron microscopy room before shielding

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TEM room during magnetic shielding work

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TEM lab magnetically shielded

Room before shielding
 
Installation of mu-metal plates
 
Shielding work completed

Systron LabShield® - TEM room:

Systron LabShield® - AC magnetic shielding for TEM room

In close proximity to the TEM room at the Technical University, EPFL, Lausanne, there is a tramway creating AC EMI, exceeding the specs for the TEM. For save operation, the room was fully shielded with Systron LabShield®, a magnetic shielding system developped to protect ebeam applications from EMI.

View of the shielded ceiling with crane bar  During installation of shielding plates  View of the room just prior move in of TEM
View of the shielded ceiling with  underneath crane bar
During construction, installation of shielding plates on the wall View of the room just prior to the move in of the TEM

Systron PowerShield® - Electrical rooms:

Systron PowerShield® - AC magnetic shielding for transformer room
 
In the largest train station in Switzerland, the Zurich main station, a transformer station had to be moved because of the construction of new railway tracks. Directly above and below of the new location of the transformer station there are so called "places of sensitive use". Those places include shops below and the kiosks above. In these areas the legal limits of the  Swiss regulation of non-ionising radiation, NISV, have to be observed. Consequently, the entire transformer station had to be magnetically shielded. The transformer station consists of three rooms, one room for the four transformers, one for the medium-voltage switchgear and one for the low voltage distribution. The rooms were passively shielded on all six sides with Systron PowerShield®. The area of the shield is approximately 800 m2.
Magnetically shielded room for low voltage switch gear . AC shielded low voltage distribution room . AC shielded medium voltage switch gear room
The low voltage room during the shielding work: floor, ceiling, walls are shielded.
 
The low voltage room completely shielded with  framework for the power distributions on the floor.
  The medium voltage room completely shielded with medium voltage system installed

Systron LabShield® - Research laboratory rooms:

Systron LabShield® - AC/DC magnetic shielding for research laboratories 

Description and concept

In the Binnig and Rohrer NanoTechnology Center, Rueschlikon, Zurich, so-called "Noise Free Labs", laboratories, for extremely sensitive measurements and experiments were implemented. These laboratories had to be protected from low-frequency magnetic fields. The specification calls for 16.7 Hz magnetic fields from the nearby railway and for  50 Hz fields from in-house sources to be limited to < 5 nT. The main interfering in-house sources were the transformer station with low voltage distribution and medium voltage system, the air-conditioning control panel and the power cables. In addition, DC-fields of the elevator and of trucks driving in and out for delivery had to be included in the concept.
 
The specification could be guarranteed with the  "Systron LabShield®", a shielding system developped by Systron EMV GmbH. The concept includes a combination of passive magnetic field shielding and active compensation system.

Passive shielding and active compensation

Passive shielding: 

The passive shielding consists of soft annealed nickel-iron (so-called "mu-metal") and aluminum and was installed on the floor, walls and ceiling in all laboratories. In addition to these laboratory room shields, the walls and ceiling of the in-house transformer station and climate control center were shielded the same way. The passive shielding of the laboratories reduces external fields and prevents internal fields from entering the neighboring laboratories.

Active compensation:

With the passive shielding already massively reducing the magnetic fields, the remaining fields are additionally reduced with the compensation system (32 dB).  The compensation system operates in the frequency range between 0.001 Hz (DC) and 10 kHz. Therefore, both DC- (elevator, trucks, doors) and AC-fields (railway and power system) are compensated.

Pictures

IBM Binnig und Rohner Nanotechcenter, during construction Floor plan electron microscopy laboratories Microscopy room during construction Magnetic field measurements during construction work
In Construction: Binnig and Rohrer Nano Technology Center
The layout of the research laboratories
Shell construction, room height 6.4 m
Review of the measured values during the shielding installation
Future TEM room during construction TEM room, magnetic shielding work done Magnetically shielded, custom made media feed through TEM room finished
Room in room construction
TEM room, shielding work done
Shielded media feed-throughs Construction work finished
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